Nano Boba Fett?  This is an artifact made of semiconductor laser material, that appeared during a process meant to etch all the laser material away.  Probably it was formed by a speck of dust landing in that spot and protecting the material underneath from the etching plasma… the remnants of the dust are likely the domed bit on top.  The dark area in front is made of glass.  Because glass is more of an electrical insulator than semiconductor, it looks darker under the electron microscope, since it sucks up electrons rather than reflecting them back to the microscope’s detector.  All of this is way, way, too small to see by eye… in fact, the top surface looks perfectly smooth, even under a regular microscope.  Only under an electron microscope is all this crazy topology revealed.