Nanozombies! These people-shaped nanopillars were formed by accident while I was etching away laser material to make the long wall at the left of the picture. They creeped me out a little until someone pointed out to me in my last picture that they look like a horde of zombies… now they creep me out a lot.
Although their bodies are made of silicon, their heads are made of laser material, meaning that they could actually be nanolaserzombies. At least they’re small - a single skin cell would be about the size of a blimp to them.